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Precision Ceramic Components

The ceramic components are made of high-purity and ultra-fine powder by sintered at high temperature and precision processed. They can be matched with relevant equipment in Japan, Germany, the United States, South Korea and China, and has superior cost performance.

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    • Commodity name: Precision Ceramic Components

    The ceramic components are made of high-purity and ultra-fine powder by sintered at high temperature and precision processed. They can be matched with relevant equipment in Japan, Germany, the United States, South Korea and China, and has superior cost performance.

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  • It is used in the ICP etching process of epitaxial thin film materials (GaN, SiO2, etc.) of LED wafer chips, the MOCVD epitaxial process of precision ceramic parts for semiconductor diffusion and semiconductor wafers, as well as packaging and testing, vacuum, wafer processing, etc.

  • Etching ceramic rings have the characteristics of high hardness, wear resistance, good accuracy retention, plasma bombardment resistance, etc., and high-purity. High-performance engineering ceramic materials can solve the problems such as plasma corrosion, particulate generation, metal contamination and oxygen decomposition in the first generation etching technology. According to user needs, we can design and manufacture a variety of standard and non-standard ceramic ring products.

    The etching tray is made of high-purity pressureless sintered silicon carbide ceramic material, which has the characteristics of high hardness, corrosion resistance, wear resistance, long service life, etc., and the product has high precision and good etching uniformity of wafer epitaxial layer. Our company can provide corresponding ceramic tray according to customer needs, diameter range: Φ50~500mm, thickness: 3~20mm. We can design and manufacture various non-standard products according to customer requirements.

    Compared with metal robotic arms, ceramic arms have the advantages of wear resistance, corrosion resistance, high temperature expansion and deformation resistance, and long service life.

    The ceramic ring has the characteristics of high hardness, high precision, good shape retention, no need for dressing, and long life. It is especially suitable for the grinding and polishing process of products with high precision requirements such as wafers or chips, and can realize the in-line high-precision dressing of grinding discs and the uniform dispersion of slurry.